The prime objective of the grating machine is to provide a fabrication technology of unusually large size stitchingless, high spatial coherence gratings with moderat cost versus size increase.
The basis of the linear unit is a stable hard stone plate finely lapped of highest precision. The upper surface of the base plate shows 2 notches. The first one is used to guarantee highest precision in straightness translation and minimal yaw deviation in horizontal X axis direction by air bearings. In the second notch, the motorization by ironless linear motor is realized. The system is placed on adjustable membrane air springs, which insulate the system from influences by vibration.