THE MICROTECHNOLOGY INFORMATION PORTAL/THE SHOW
20.10.2022
C - Automatisation
Laser Micromachining Setup Upgrade at Lawrence Berkeley Laboratory
With the help of Direct Machining Control, a micromachining setup at Lawrence Berkeley Laboratory was upgraded to expand the capabilities of controlling multiple devices.
The setup is intended for the research and development using laser machining techniques for semiconductor machining. The setup was comprised of 4 axes Aerotech positioning system, galvo scanners, controlled with RTC4 card, a laser source emitting one of 3 wavelengths, cameras for machine vision, height sensor, power meter and other devices. DMC was installed to increase the efficiency of the R&D process by making the control of all the devices intuitive, visual and simple.
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